W Gradedly-doped Diamond-like Carbon Thin Films

摘要

W gradedly-doped diamond-like carbon films were deposited on silicon and stainless steel by a hybrid technique combining ion beam deposition with magnetron sputtering.The structure,mechanical performance,friction coefficient,and wear loss were investigated.With increasing W target current applied,the structure of the as-prepared films changed from amorphous DLC to a composite of metal-containing DLC and metal carbides; the content of sp3 structure decreased from 31.26％ to 22.3％;the nanohardness increased from 12 GPa to 28 GPa; the elastic modulus increased from 170 GPa to 310 GPa; and the critical loads were in the range of 80～100 N.The comprehensive tribological property of the as-prepared samples was improved after W doping.