W Gradedly-doped Diamond-like Carbon Thin Films

摘要

W gradedly-doped diamond-like carbon films were deposited on silicon and stainless steel by a hybrid technique combining ion beam deposition with magnetron sputtering. The structure, mechanical performance, friction coefficient, and wear loss were investigated. With increasing W target current applied, the structure of the as-prepared films changed from amorphous DLC to a composite of metal-containing DLC and metal carbides; the content of sp~3 structure decreased from 31.26% to 22.3%; the nanohardness increased from 12 GPa to 28 GPa; the elastic modulus increased from 170 GPa to 310 GPa; and the critical loads were in the range of 80～100 N. The comprehensive tribological property of the as-prepared samples was improved after W doping.