Theoretical and experimental investigation of langasite as material for wireless high temperature SAW sensors

摘要

Different cuts of langasite were investigated theoretically and experimentally as candidates for high temperature sensors utilizing SAW resonators and reflecting SAW tags. Single port SAW resonators with central frequencies close to 170, 200 and 433 MHz with W, Ir and Pt electrodes of different thickness were fabricated and their characteristics were measured as functions of temperature. An approach to SAW device encapsulation, which helps to avoid stress development during heating to high temperatures, was suggested and tested. The damage of the langasite surface during heating to high temperature is strong in the cut family with Euler angles (0°, 138.5°, ψ), while orientations with Euler angles (0°, 90°, ψ) and (0°, 22°, ψ) were found to be more resistant to heating. In the latter cut family, two cuts, (0°, 22°, 31.5°) and (0°, 22°, 90°) can provide zero power flow angle and sufficient piezoelectric coupling. COM parameters of SAW resonators with W, Ir and Pt electrodes, including complex reflection coefficient, were calculated as functions of electrode thickness and measured in the wide temperature range. The frequency responses were described by COM equations and the fitted COM-parameters were compared to their simulated values. Resonators show high Q and their performance is perfectly described by COM equations