Modelling and control of hybrid vibration isolation system for high-precision equipment

摘要

This paper presents the dynamic modelling and control of a six degree-of-freedom (DOF) active vibration isolation system for high-precision equipment. First, the six DOF rigid body model of the system is developed. Then, the hybrid controller which is a combination of the feedback controller with the nonmodel based adaptive feedforward compensator is proposed. The feedback controller is based on absolute velocity and feedforward compensation is based on the filtered-x least mean square (FxLMS) algorithm. The results of theoretical analysis and simulation demonstrate the performance and effectiveness of the proposed controller.