STATIONARY VIBRATION ISOLATION SYSTEM AND METHOD FOR CONTROLLING THE VIBRATION ISOLATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a stationary vibration isolation system which can compensate in a simple manner for forces produced by motions of an anti-vibration load without increasing actuators generating force.SOLUTION: A stationary vibration isolation system comprises a lithography apparatus with a vibration isolator, and comprises an anti-vibration load in horizontal and vertical directions mounted on a base and comprising a moving mass. The anti-vibration load is coupled to the base via a damper which is effective in the horizontal direction and which comprises a fluid of variable viscosity.