Fabrication and Measurement of the Vitreous Micronozzle for Noncontact Spotting

摘要

In order to solve the problems of the most existing micro nozzles,for example,complex manufacturing process and structure,high cost,fabrication technology available by few foreign companies,the vitreous micronozzles with micron orifice diameter were made for noncontact spotting,based on the thermal processing technology.Glass materials have the good performance in transparency and micro processing.First,the principle of fabrication was introduced.Then,the microscopic measurement system was built.For the sake of analyzing how the characteristic parameters of micro inner flow channel affect the micro jetting,the orifice diameter was measured and the micro inner flow channel contour curves were fit.Finally,the noncontact spotting had been done,with the 100μm orifice diameter vitreous nozzle.The experimental results show that the vitreous micronozzles have the good performance in single drop and stability,and the round spots diameter is about 100μm.It can satisfy the microarray requirements.