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Reliability of Cu wire bonding on active area for automotive applications

机译:汽车应用中活性区域上铜丝键合的可靠性

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Increasing cost of gold (Au) for bonding wires and decreasing die and, therefore, bond pad size raise the demand for alternative bonding wire materials. A cheap alternative with good electrical conductivity is copper. Cu wire is harder than gold and aluminium. The material itself shows a pronounced strain hardening, so that the hardness increases significantly during ball bonding. These mechanical properties of Cu increase the stress on the bond pad and chip compared to Au and Al wires. A sensitive analysis in terms of reliability is required to assess the interconnect performance, especially for the combination of bonding over active area and in automotive applications. We present a reliability study of 50 ¿m Cu wire on a Cu based bond pad for automotive applications. Initial evaluations were done to assess the impact of bonding parameters, floor live time and forming gas flow rate on the process performance. A detailed reliability assessment follows to assess the interconnect performance. Electron Microscopy (transmission TEM, and scanning SEM) and cratering test were used to assess changes in the material after stress test and electrical testing to ensure the functionality of the product. It shows that Cu wire can be used even for critical applications and bonding on active area with good reliability performance.
机译:用于键合线的金(Au)成本的增加和管芯的减小,因此,键合焊盘的尺寸增加了对替代键合线材料的需求。具有良好导电性的廉价替代品是铜。铜线比金和铝硬。材料本身显示出明显的应变硬化,因此在球焊过程中硬度显着提高。与金和铝导线相比,铜的这些机械性质会增加键合焊盘和芯片上的应力。需要进行可靠性方面的敏感分析,以评估互连性能,尤其是在有源区域和汽车应用中进行结合的情况下。我们目前在汽车应用基于铜的焊盘上进行50 µm铜线的可靠性研究。进行了初步评估,以评估粘结参数,地板寿命和成型气体流速对工艺性能的影响。随后进行了详细的可靠性评估,以评估互连性能。电子显微镜(透射TEM和扫描SEM)和缩孔测试用于评估应力测试和电气测试后材料的变化,以确保产品的功能。结果表明,铜线甚至可以用于关键应用,并可以在有源区域上以良好的可靠性性能进行键合。

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