Integrated CMOS-MEMS Technology and Its Applications

摘要

The paper describes integrated CMOS-MEMS technology and its applications. We discuss the features of integrated complementary metal-oxide-semiconductor-microelectromechanical systems (CMOSMEMS). The prospect of this integration is also presented. AMEMS fingerprint sensor and a low-voltage radio frequency (RF) CMOS-MEMS switch are the case studies discussed. In conclusion,it is confirmed that the integrated CMOS-MEMS technology will pave the way for the More than Moore technology.