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Stress Control in Sputter Deposited Black CrCN Films for Decorative Applications

机译:溅射沉积黑CRCN薄膜的应力控制用于装饰应用

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Black/grey chromium carbon nitride coatings were deposited by means of unbalanced magnetron sputtering of chromium in a argon-nitrogen-acetylene gas mixture. The coatings were produced in an industrial sized batch reactor, a Flexicoat 1200 system from Hauzer Techno Coating. The stress induced adhesive failure and the color of black/grey chromium carbon nitride coatings has been investigated as a function of several process parameters. The coatings change from grey to black as the nitrogen-acetylene flow is increased. By increasing the nitrogen-acetylene flow the risk of stress induced adhesive failure increases. Stress induced adhesive failure can be prevented by appropriate changes in the process settings.
机译:通过在氩氮 - 乙炔气体混合物中的铬的不平衡磁控溅射沉积黑/灰色铬碳氮化物涂层。涂层在工业尺寸的批量反应器中生产,来自Hauzer Techno涂层的柔性煤1200系统。已经研究了应力诱导的粘合衰竭和黑色/灰色碳氮涂料的颜色作为几个工艺参数的函数。随着氮乙炔流动增加,涂层从灰色变为黑色。通过增加氮 - 乙炔流动,应激诱导的粘合衰竭的风险增加。通过对过程设置的适当变化,可以防止应激诱导的粘合衰竭。

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