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Lossy Mode Resonance Generation on Sputtered Aluminum-Doped Zinc Oxide Thin Films Deposited on Multimode Optical Fiber Structures for Sensing Applications in the 1.55 µm Wavelength Range

机译:在1.55 µm波长范围内用于传感应用的多模光纤结构上沉积的溅射掺杂铝的氧化锌薄膜上产生有损模共振

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摘要

In this work, we demonstrated lossy mode resonance (LMR) generation in optical fiber structures based on multimode fibers coated with aluminum-doped zinc oxide (AZO) films. AZO thin films were deposited by using radio frequency magnetron sputtering. In order to exhibit the usefulness of the LMR effect for sensing applications in optical fiber based systems, the deposition conditions of the AZO film coatings were set to obtain the second LMR order within the 1.55 µm wavelength range. An optical transmission configuration setup was used to investigate the LMR effect on fiber structures based on the use of no-core and cladding-removed multimode fibers coated with AZO films synthesized from metallic sputtering targets with different proportions of Zn:Al, 92:8% and 98:2%, at atomic concentrations. The optical and electrical/chemical features of the AZO films were characterized with UV–vis and XPS spectroscopy, respectively. The optical response of the proposed sensing configuration to refractive index (RI) variations was experimentally demonstrated. For the best approach, the sensitivity of wavelength displacement to RI variations on the liquid surrounding media was found to be 1214.7 nm/RIU.
机译:在这项工作中,我们证明了基于涂有掺铝氧化锌(AZO)薄膜的多模光纤在光纤结构中产生的损耗模共振(LMR)。通过使用射频磁控溅射沉积AZO薄膜。为了展示LMR效应对基于光纤的系统中传感应用的有用性,将AZO膜涂层的沉积条件设置为在1.55 µm波长范围内获得第二LMR级。使用光传输配置设置来研究LMR对光纤结构的影响,方法是使用无芯和除去包层的多模光纤,这些光纤涂覆有AZO膜,该膜由具有不同比例的Zn:Al,92:8%的金属溅射靶合成在原子浓度下为98:2%。分别用紫外可见光谱和XPS光谱对AZO膜的光学和电学/化学特性进行了表征。实验证明了所提出的感测配置对折射率(RI)变化的光学响应。对于最佳方法,发现波长位移对液体周围介质上RI变化的敏感度为1214.7 nm / RIU。

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