Microcavity Plasmas: Physics and Applications

摘要

Confining plasmas in electrode geometries with characteristic dimensions in the submillimeter range allows the generation and maintenance of stable, nonequilibrium gas discharges in rare gases as well as molecular gases at high pressures. The plasma group at Old Dominion University has focused its research on two types of microdischarges, microhollow cathode discharges (MHCDs) and cathode boundary layer discharges (CBLDs). The current-voltage characteristics of these discharges have a positive slope in certain current ranges, which makes possible the fabrication of microplasma arrays without individual ballast. The nonthermal electron energy distribution in these low temperature plasmas, which can be operated at atmospheric pressure, favors the production of chemically reactive species and of transient molecular species such as excimers. Applications include high intensity, flat panel excimer lamps, plasma reactors, and cold plasma sources for biological decontamination of sensitive surfaces.