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Quapason™ : a low vibration sensitivity vibrating rate gyro

机译:Quapason™:振动灵敏度低的陀螺仪

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The performance of vibrating MEMS gyroscopes are often presented in terms of drift, without indicating what definition of drift is used. Generally, the given figure corresponds to the lowest point of Allan variance which is the best figure for a given gyroscope. This figure allows comparing different gyros but is not really useful information about the operational performance. In fact, for a lot of applications, the most important figure is the environmentally sensitive drift rate, especially the one depending on applied mechanical vibrations.This paper analyses the origin of the mechanical vibration sensitive drift rate which is directly related to resonator manufacturing process tolerances. It presents tests results obtained with the Quapason™, a metallic vibrating gyroscope with a high (resonator volume)/(total volume) ratio. The 3D design of Quapason™ ensures relatively good insulation and the resonator is manufactured using cheap and classical machine tools which give relatively accurate precision so that the sensor has very low sensitivity to external mechanical vibrations. The sensitivity of several Quapason™ with different balancing level will be presented.
机译:振动MEMS陀螺仪的性能通常以漂移来表示,而没有指出使用了哪种漂移定义。通常,给定的数字对应于Allan方差的最低点,这是给定陀螺仪的最佳数字。该图允许比较不同的陀螺仪,但实际上不是有关运行性能的有用信息。实际上,对于许多应用而言,最重要的数字是对环境敏感的漂移率,尤其是取决于所施加的机械振动的漂移率。 本文分析了机械振动敏感漂移率的起源,它与谐振器制造工艺的公差直接相关。它显示了使用Quapason™(一种具有高(谐振器体积)/(总体积)比率的金属振动陀螺仪)获得的测试结果。 Quapason™的3D设计可确保相对良好的绝缘性,并且谐振器是使用廉价且经典的机床制造的,这些机床可提供相对准确的精度,因此传感器对外部机械振动的灵敏度非常低。将介绍几种具有不同平衡级别的Quapason™的灵敏度。

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