Vibration gyro element , supporting structure and the gyro sensor of the vibrating gyro element .

摘要

PROBLEM TO BE SOLVED: To provide a vibration gyro element in which impact resistance is improved.;SOLUTION: A beam 20b is caused to extend from an outer edge of a base portion 10 between a coupling arm 13b and a detecting vibration arm 11a. The beam 20b is configured so as to include: a first extension portion 20b1 extending from the base portion 10 in a plus direction of an X-axis along the X-axis; a second extension portion 20b2 extending from a leading end portion of the first extension portion 20b1 in a plus direction of a Y-axis along the Y-axis; and a first folded-back portion 20c including a third extension portion 20b3 extending from a leading end portion of the second extension portion 20b2 in a minus direction of the X-axis along the X-axis. The first extension portion 20b1 and the third extension portion 20b3 are disposed at an interval W1 at which a first irregular-shaped portion H1 generated inside a corner portion 20c1 formed by the first extension portion 20b1 and the second extension portion 20b2 of the first folded-back portion 20c and a second irregular-shaped portion H2 generated inside a corner portion 20c2 formed by the second extension portion 20b2 and the third extension portion 20b3 are not brought into contact with each other as viewed in a plan view.;COPYRIGHT: (C)2014,JPO&INPIT