Fabrication of STO Buffer Films on MgO Substrates by the MOD Method

摘要

We fabricated SrTiO_3 (STO) thin films, which are expected to be used as buffer layers on MgO substrates, by the metal-organic decomposition (MOD) method, and evaluated the properties of the films. By introducing a 2-step heat treatment and optimizing the precursor temperature, we could improve the full width at half maximum (FWHM) values of the rocking curves up to 1.81 deg in the X-ray diffraction (XRD) measurements of the STO films on MgO substrates. The minimum FWMH value of the in-plane rocking curves of the films was 2.60 deg and the films had a cube-on-cube structure on the MgO substrates. Furthermore, the root mean square (rms) roughness values of the surfaces of the STO thin films derived from atomic force microscopy (AFM) were 2.11-5.37 nm.