Dynamic Photoelectric Autocollimator Based on Two-dimension Position Sensitive Detector

摘要

In order to improve the measurement precision of an autocollimator and achieve dynamic measurement of small angle, a dynamic photoelectric autocollimator with high frequency response based on two-dimension position sensitive detector is designed by means of principle of autocollimation. The scheme and the design procedure of dynamic photoelectric autocollimator (DPA) are proposed. The dynamic accuracy measurement method of DPA has been mainly presented. A mirror was fixed on the uniform rotate stage. The DPA sample the angle of the mirror that was put on the rotate plat at an invariable sampling interval. The deviation between the angle of the rotate plat and the angle of mirror that sampled byDPA is dynamic accuracy of DPA. The experimental results indicate that the static accuracy of DPA is 1.0" with the measurement range of 400" . The dynamic response frequency of the DPA is 5kHz and its dynamic accuracy is 1.9"with the range of 400" . This method that measure two-dimension angular error is an effective approach to high-speed dynamic angular measurement.