Nanostructured ZnO thin film based CO_2 sensor by RF sputtering technique

摘要

In this research we aim at developing a CO_2 sensor by depositing nanostructured ZnO over Au/Ti interdigitated electrodes using RF sputtering technique. Sensor is being developed, keeping in mind the hazards caused by sudden increase of CO_2 in mines, areas of volcanic activities, industries, spots of gas leakages, highly polluted cities around the world, etc. CO_2 being odourless and colourless cannot be easily sensed or detected by organisms until adverse effects in health condition such as suffocation, loss of conscious, uneasiness, etc. are observed. Latest researches in medical field also shows that few diseases can be detected by monitoring the amount of CO_2 exhaled during respiration. The deposited thin film was characterised for its structural, topographical and morphological studies. All the experiments carried out to detect the gas were performed at room temperature and under ambient conditions, with atmospheric air as carrier gas in order to detect only the increased amount of CO_2.