FEM-based Simulation of Fixing Mode of High Precision Lightweight Reflection Mirror

摘要

In order to satisfy the demand of measuring precision of the light beam-guided sensor used in a specific high precision measuring device with machine vision, as the main error sources are known from the positioning precision of the lightweight reflection mirror, the mathematic and physic modeling is made by the basic theory of finite element method (FEM), and four kinds of positioning and fixing ways of the mirror are simulated by the finite element analysis software of I-DEAS. The four ways of fixing, i.e. (1) fixing at three points uniformly distributed at the edge of top surface; (2) fixing at four points uniformly distributed at the edge of top surface; (3) fixing at three point uniformly distributed at side surface and (4) fixing at four points uniformly distributed at side surface. The simulation results indicate that the fixing at three points uniformly distributed at the edge of top surface is the best way, and by the way the radial drifts of the light spot at CCD imaging plane is little than 1.81 μm.