METHOD OF INSPECTING MIRROR SURFACE PRECISION FOR CURVED SURFACE MIRROR, INSPECTION DEVICE FOR MIRROR SURFACE PRECISION FOR FOR CURVED SURFACE MIRROR, PREPARATION METHOD FOR MIRROR SURFACE PRECISION INSPECTING PATTERN FOR CURVED SURFACE MIRROR, AND MIRROR SURFACE PRECISION INSPECTING PATTERN FOR CURVED SURFACE MIRROR

摘要

PROBLEM TO BE SOLVED: To inspect mirror surface precision as to an aspherical curved surface mirror having a freely curved face or the like.;SOLUTION: An arrangement position of the inspection-objective curved surface mirror, an imaging position of an imaging means, and an arrangement position of a pattern for inspection are supposed respectively. The pattern for the inspection in an arrangement position of the pattern for the inspection is found by a ray tracing computation to be prepared, so as to bring a reflection image of the pattern for the inspection imaged in the imaging position into a linear or a truly round pattern having no distortion, based on a design data for the inspection-objective curved surface mirror. The inspection-objective curved surface mirror prepared actually based on the design data, the imaging means and the prepared pattern for the inspection are arranged in corresponding positions estimated respectively when preparing the pattern for the inspection. The pattern for the inspection is reflected on the inspection-objective curved surface mirror, a reflection image therein is picked up by the imaging means, and the mirror surface precision of the inspection-objective curved surface mirror is inspected based on the picked-up reflection image.;COPYRIGHT: (C)2005,JPO&NCIPI