SiO_x thin films as material for uncooled microbolometer

摘要

Composite metal-dielectric SiO_x films with concentration of metal varied on thickness in dielectric matrix SiO_x are investigated. The reflectance and transmittance of the samples at normal incidence were measured in the 2-12 microns wavelength range. In the wavelength range of 2-8,5 microns absorption of the films is about 90%, in more long-wavelength area 8,5-12 microns absorption is equal 70 - 80%. The optical properties of these gradient layers are simulated, and the results of simulation are compared with experimental data. In a range of temperatures 283-390K thermosensitive properties of SiO_x films are investigated and values of temperature coefficient of resistance is determined. These coatings can be used as a sensitive layer of uncooled microbolometers.