首页> 外文会议>AIChE annual meeting >Run to Run Process Control inSemiconductor Manufacturing;Applied Materials’ solution forBEOL Dep-Etch Processes

【24h】

Run to Run Process Control inSemiconductor Manufacturing;Applied Materials’ solution forBEOL Dep-Etch Processes

机译：半导体制造中的运行过程控制;适用材料的BEOL蚀刻工艺解决方案

获取原文

页面导航

著录项
相似文献
相关主题

著录项

来源
《AIChE annual meeting》|2003年|1-11|共11页
会议地点
作者
I. Iliopoulos; A. Schwarm; K.S. Jun; M. Armacost;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类
关键词

相似文献

外文文献
中文文献
专利

1. Structure Solution from Powder X-Ray Diffraction Data by Genetic Algorithm Techniques, Applied to Organic Materials Generated as Polycrystalline Products from Solid State Processes [J] . KENNETH D. M. HARRIS Materials and Manufacturing Processes . 2009,第1a3期

机译：粉末X射线衍射数据遗传算法的结构解，应用于固态过程中作为多晶产物生成的有机材料
2. NONAQUEOUS ELECTROLYTE SOLUTIONS - NEW MATERIALS FOR DEVICES AND PROCESSES BASED ON RECENT APPLIED RESEARCH [J] . Gores HJ., Barthel JMG. Pure and Applied Chemistry . 1995,第6期

机译：非电解质溶液-基于最近应用研究的用于设备和过程的新材料
3. A NEA review on innovative structural materials solutions, including advanced manufacturing processes for nuclear applications based on technology readiness assessment [J] . F. Balbaud, C. Cabet, S. Cornet, Nuclear Materials and Energy . 2021,第a期

机译：关于创新结构材料解决方案的综述，包括基于技术准备评估的核应用的先进制造工艺
4. Run to Run Process Control inSemiconductor Manufacturing;Applied Materials’ solution forBEOL Dep-Etch Processes [C] . I. Iliopoulos, A. Schwarm, K.S. Jun, AIChE annual meeting . 2003

机译：运行流程控制暂讯导体制造;应用材料'解决方案Forbeol Dep-蚀刻工艺
5. Intelligent modeling and control of chemical processes for manufacturing composite materials [D] . Su, Hong-Bo. 1996

机译：用于制造复合材料的化学过程的智能建模和控制
6. The development of an herbal material quality control strategy considering the effects of manufacturing processes [O] . Jingjing Pan, Siyuan He, Jiayao Zheng, 2019

机译：考虑生产过程影响的草药材料质量控制策略的开发
7. A WMS Model Interfacing with Material Warehouse in Real Time in Puting Materials to Manufacturing Processes - in Automobile Parts Manufacturing Industry - [O] . Myung-Dal Kong 2014

机译：用材料仓库实时与材料仓库的WMS模型，以制造过程 - 在汽车零件制造业中 -

Run to Run Process Control inSemiconductor Manufacturing;Applied Materials’ solution forBEOL Dep-Etch Processes

著录项

相似文献

相关主题

期刊订阅