The fabrication and characterization of a micromachined field effect diode with a moving anode is described. The device can be used as acceleration sensors exploiting the strong dependence of the diode current on the cathode-anode distance. The diode consists of a silicon cathode and an aluminum anode, supported by a flexible silicon dioxide membrane. Only two masks and the deposition of a double metal Al/Cr are necessary. A solution of ethylenediamine pyrocatechol pyrazine, which can be used during the integrated circuit post-processing, was employed as anysotropic etching.
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