VHDL-AMS MEMS MODELING AND SIMULATION WITH MATLAB~(TM)

摘要

This work describes the simulation of a MEMS-based oscillator, composed by a MEMS resonator and a transresistance amplifier. The presented implementation uses standard Vhdl-Ams language, a suitable behavioral language for describing mixed-domain systems, and was simulated by using the developed Vhdl-Ams compiler and simulation framework SAMSA, which allows for complete DC, AC and transient analyses. By using this tool, modeling and simulation of several MEMS devices is possible, and complex analog/digital systems can be designed and simulated together with different simulation techniques, exploiting Matlab~(TM) functions and Toolboxes.