Intelligent process monitoring of multilayer ceramic actuators using high-temperature optical fiber displacement sensors

摘要

A technique that uses embedded or attached high temperature optical fiber sensors is demonstrated for the intelligent processing of multilayer ceramic actuator elements. Presented are the results of the fiber optic strain sensor used to monitor internal displacements associated with the burnout of organic binders from a green actuator sample. Also presented is the method of operation of the low-finesse Fabry-Perot interferometric sensor, and post processing results obtained using the same type of sensor for tracking actuator performance and hysterisis.