Status, Trends, Comparison and Evolution of EPROM and FLASH EEPROM Technologies

摘要

The actual status of EPROM and FLASH EPROM technology is reviewed in term of market growth and potential applications. The different Flash cell approaches are compared in term of Process Complexity, manufacturability, yield and scaling limiting factors as well as disturb mechanisms, cycling endurance and reliability. The issues for future low power generation are reviewed along with the different trends.