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The Microstructure and State of Stress of Sn Thin Films after Post-Plating Annealing: An Explanation for the Suppression of Whisker Formation?

机译:后镀退火后Sn薄膜的微观结构和应力状态:晶须形成抑制的解释?

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The post-plating annealing (`post-bake'' treatment, annealing at 150掳C for 1 h) of pure matte Sn thin films on Cu-based substrates is known to be an effective whisker mitigation treatment. The microstructure and the stress state of Sn thin films on Cu-substrates produced with and without a `post-bake'' treatment have been investigated using scanning electron and focused ion beam microscopy (SEM & FIB), X-ray photoelectron spectroscopy (XPS) and ageing time and depth-dependent X-ray diffraction (XRD) stress analyses. A comparison of the measured stress-depth gradients in the near-surface regions of the Sn thin films produced with and without `post-bake'' treatment indicates differences that might provide a plausible explanation for the observed long-term resistance against whisker growth of Sn thin films subjected to a `post-bake'' treatment. In specimens subjected to a `post-bake'' treatment, an almost depth-independent tensile stress state prevails in the surface region even after prolonged ageing.
机译:已知在基于铜的基底上进行纯哑锡薄膜的镀后退火(“后烘烤”处理,在150°C退火1小时)是一种有效的晶须缓解处理。使用扫描电子和聚焦离子束显微镜(SEM&FIB),X射线光电子能谱(XPS)研究了在有和没有经过“后烘烤”处理的情况下在Cu衬底上生产的Sn薄膜的微观结构和应力状态。 )以及老化时间和与深度有关的X射线衍射(XRD)应力分析。比较在有和没有“后烘烤”处理的情况下生产的Sn薄膜近表面区域中测得的应力深度梯度,表明差异可能为观察到的长期抗晶须生长提供了合理的解释。 Sn薄膜经过“后烘烤”处理。在经过“后烘烤”处理的样品中,即使长时间老化,其表面区域仍存在几乎与深度无关的拉伸应力状态。

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