Research on Modelling and Controlling for Active Vibration-isolation System on Testing Equipment of Stepping and Scanning Lithography

摘要

In order to provide academic steering for the design of Stepping and Scanning Lithography and settle the vibration problems of the key part caused by the high speed motion of the wafer stage and the stencil stage, the paper designs a simulated Vibration-isolation Testing Equipment of the Stepping and Scanning Lithography which the inner-world and the outside-world are connected by four precision six degree of free vibration isolators based on its motion features and working requirements in industry. The article also researches the application of the PID-model reference control method in the fields of the active vibration reduction using the Z direction as sample. Results indicate that this control method has better control effect than the effect using direct model reference control method.