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Optimizing Movement Sequences for Step-and-Scan Lithography Equipments(Mechanical Systems)

机译：优化步进扫描光刻设备的运动序列（机械系统）

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Nobuo INUI; Yuji SHINANO; Youzou FUKAGAWA; Noburu TAKAKURA;
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年度 2010
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1. Optimizing Movement Sequences for Step-and-Scan Lithography Equipment [J] . Yuji SHINANO, Nobuo INUI, Youzou FUKAGAWA, Journal of Advanced Mechanical Design, Systems, and Manufacturing . 2013,第4期

机译：步进扫描光刻设备的最佳运动顺序
2. Design automation and optimization of assembly sequences for complex mechanical systems [J] . Sun Jin, Wayne Cai, Xinmin Lai, The International Journal of Advanced Manufacturing Technology . 2010,第9a12期

机译：复杂机械系统的设计自动化和装配顺序的优化
3. Design automation and optimization of assembly sequences for complex mechanical systems [J] . Sun Jin, Wayne Cai, Xinmin Lai, The International Journal of Advanced Manufacturing Technology . 2010,第9a12期

机译：复杂机械系统的设计自动化和装配顺序的优化
4. DESIGN RELIABILITY ASSESSMENT OF MECHANICAL EQUIPMENT OF HYDRAULIC ENGINEERING STRUCTURES AND SYSTEM-BASED OPTIMIZATION OF STRUCTURAL DESIGN [C] . Sofja M. LEVINA, Naum V. SHRAGIN, Vladimir B. SHTILMAN Twentieth International Congress on Large Dams Vol.4: Question 79; Sep 19-22, 2000; Beijing, China . 2000

机译：液压工程机械设备的设计可靠性评估及结构设计的系统优化
5. Optimization of mechanical oil spill recovery equipment under variable environmental conditions. [D] . Broje, Viktoria A. 2006

机译：在可变环境条件下优化机械溢油回收设备。
6. Design and Fabrication by Thermal Imprint Lithography and Mechanical Characterization of a Ring-Based PDMS Soft Probe for Sensing and Actuating Forces in Biological Systems [O] . Tommaso Dattoma, Antonio Qualtieri, Gianmichele Epifani, 2019

机译：通过热压印光刻技术设计和制造基于环的PDMS软探针用于生物系统中的传感和驱动力。
7. Optimizing Movement Sequences for Step-and-Scan Lithography Equipment [O] . Yuji SHINANO, Nobuo INUI, Youzou FUKAGAWA, 2013

机译：优化步进扫描光刻设备的运动序列
8. Algorithm for Optimizing Movement of Equipment among POMCUS Storage Facilities(MOVER) [R] . Rennekamp, P. L. 1991

机译：优化pOmCUs存储设备（mOVER）设备移动的算法

Optimizing Movement Sequences for Step-and-Scan Lithography Equipments(Mechanical Systems)

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