Ion beam mixing of Au/Fe multilayers by Ar ion implantation

摘要

Physical properties of metallic multilayers (MLs) are strongly influenced by the layer and interface structure. We have investigated the ion implantation effects on Au/Fe MLs to improve and control the physical forms. The ion implantation has been performed to [0.3 nm Fe/1.2 nm Au]/sub 180/ Au/Fe MLs with 400 and 800 keV Ar ions. The magnetization and Conversion Electron Mossbauer Spectroscopy (CEMS) measurements show the considerable changes in the physical properties by Ar ion implantation due to mixing processes. The result indicates that one can control the structural and magnetic properties of Au/Fe MLs by selecting an energy and a dose of Ar ion implantation.