Ion implanter testing and process results using low pressure, zeolite-based gas bottles in medium and high current ion implanters

摘要

A new type of toxic gas storage and delivery system for ion implanters was introduced to selected users for evaluation in 1992. This new style gas bottle is filled with solid zeolite and is capable of storing hydrides (PH/sub 3/ and AsH/sub 3/) in their pure form. Even at slightly less than atmospheric pressure, the new bottle can deliver 300 to 500% and more PH/sub 3/ and AsH/sub 3/ than conventional bottles of equal size. Ion implanter end user acceptance has been rapid. The increased safety due to the virtual elimination of the possibility of catastrophic release is the basis for the system's popularity. Secondary popularity stems from the "energy purity" feature of the system due to the reduced gas flow needed and consequentially improved vacuum levels.