Dielectric and piezoelectric properties of PNN-PZN-PZT ceramics for actuator application

摘要

In the fields of optics, precision machinery and semiconductor processing, microposition actuators are required for the control of position in the submicron range. In this paper, 0.5PNN-(0.5-x)PZN-xPZT(x:0.0/spl sim/0.5) ceramics were fabricated with various mole ratios of the PZT powders prepared by a molten-salt synthesis method and PNN, PZN powders prepared by a columbite precursor method. The formation rate of perovskite phase in PNN-PZN-PZT ceramics could be obtained at about 92[%] by using PNN and PZN powders prepared by the columbite precursor method. The bulk density of 0.5PNN-(0.5-x)PZN-xPZT specimens, where the mole ratio K was 0.3, was 7.39/spl sim/7.42[kg/m/sup 3/]. The relative permittivity of 0.5PNN-0.2PZN-0.3PZT ceramics was found to be 5,320 and the relaxor ferroelectric feature appeared.