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New developments in hollow microspheres that may be added to MCM-L and MCM-C substrates for multichip modules

机译:中空微球的新进展可能会添加到多芯片模块的MCM-L和MCM-C基板中

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This paper summarizes the characteristics of hollow microspheres that may be added to thick film dielectrics and printed wiring board laminates to lower the dielectric constant of these substrates. Such printed wiring board laminates and thick film dielectrics may now be considered excellent candidate substrates for multichip modules. One critical parameter for addition of microspheres to these substrates is the particle size distribution. Processes were developed to bring maximum particle sizes down to 15-20 microns. Electrical characteristics are detailed, with data presented to 22 gigahertz. Materials characteristics are detailed, using SEM, XPS, XRD, and electron spectroscopy. The materials characterization is linked to the electrical characterization, leading to the conclusion that a crystalline product forms during the processing of the spheres, and the amount of the crystalline product is a direct indicator of electrical performance.
机译:本文总结了空心微球的特性,可以将其添加到厚膜电介质和印刷线路板层压板中,以降低这些基板的介电常数。这样的印刷线路板层压板和厚膜电介质现在可以被认为是用于多芯片模块的极好的候选基板。向这些基质中添加微球的一个关键参数是粒度分布。已开发出可将最大粒径降至15-20微米的工艺。详细的电气特性,数据显示为22 GHz。使用SEM,XPS,XRD和电子光谱对材料特性进行了详细说明。材料的表征与电学表征相关,从而得出结论,在球体的加工过程中会形成结晶产物,而结晶产物的量是电气性能的直接指标。

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