InGaAsP-InP ridge-waveguide DBR lasers with first-order surface gratings fabricated using CAIBE

摘要

Generally, the fabrication of distributed Bragg reflector (DBR) and distributed feedback (DFB) lasers requires regrowth over a grating. While fabricating these devices, special measures must be taken in order to preserve the grating during the regrowth. Moreover, surface preparation techniques are needed to remove grating fabrication contamination before regrowth. Utilizing surface gratings to fabricate DBR lasers solves the problem of regrowth. In this work, we employ chemically assisted ion beam etching (CAIBE) to form first-order DBR gratings into a 0.74 /spl mu/m thick upper cladding structure for an InGaAsP-InP ridge-waveguide (RW) DBR QW laser with a first-order grating.