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Enhanced cryogenic on-wafer techniques for accurate In/sub x/Ga/sub 1-x/As HEMT device models

机译:增强型低温晶圆上技术,可实现准确的In / sub x / Ga / sub 1-x / As HEMT器件模型

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摘要

An accurate on-wafer cryogenic measurement system is presented for empirical millimeter-wave device studies of In/sub x/Ga/sub 1-x/As HEMTs. Multi-line TRL calibrations are performed to provide traceable baseline results for cryogenic S-parameter measurements. This technique is then applied to develop wide frequency band small-signal models for HEMTs with In channel composition varied from 22% to 70%.
机译:提出了一种精确的晶圆上低温测量系统,用于In / sub x / Ga / sub 1-x / As HEMT的经验毫米波设备研究。执行多线TRL校准可为低温S参数测量提供可追溯的基线结果。然后将此技术应用于为In通道组成从22%到70%不等的HEMT开发宽带小信号模型。

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