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DEVELOPMENT OF AN ULTRASONIC EXTRACTION METHOD TO EVALUATE THE CLEANLINESS OF WAFER STORAGE BOXES PREPARED BY ELECTROSTATICALLY ENHANCED PARTICLE DEPOSITION

机译:超声提取法评估静电储存颗粒沉积制备的晶圆储存盒的清洁度

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摘要

An ultrasonic extraction method to evaluate the cleanliness of wafer storage boxes has beenrndeveloped. Standard boxes are prepared using an electrostatically enhanced particle deposition system.rnExperimental results show that this ultrasonic method can extract about 80% of the 1.03 μm particlesrndeposited, and has a good repeatability. It is concluded that this method is an applicable and reliablernmethod for evaluating the cleanliness of wafer storage boxes.
机译:已经开发了用于评估晶片存储盒的清洁度的超声提取方法。使用静电增强颗粒沉积系统制备标准盒。实验结果表明,该超声方法可提取沉积的1.03μm颗粒的约80%,并具有良好的重复性。结论是,该方法是评价晶片存放盒清洁度的一种适用且可靠的方法。

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