首页> 外文会议>Laser Metrology: Macro-, Micro-, and Nano-technologies Applied in Science, Engineering, and Industry >Optical Tomography Of Phase Objects With Phase-Shifting Interferometry And Stepping Wise Shifted Ronchi Ruling
【24h】

Optical Tomography Of Phase Objects With Phase-Shifting Interferometry And Stepping Wise Shifted Ronchi Ruling

机译:具有相移干涉法和步进式明智的伦奇法则的相对象的光学层析成像

获取原文
获取原文并翻译 | 示例

摘要

An experimental setup for tomographic inspection of phase objects is presented. The system is based on an interferometer which uses two windows in the input plane and a translating grating as its pupil. In the output, interference of the fields associated with replicated windows can be achieved by a proper choice of the spacing between windows with respect to the grating period. Placing a rotating object in one window and with a reference crossing through the second one, the phase of projections results encoded in a composite interference pattern over the plane of the traditional sinogram. Phase stepping of such composite interferograms can be achieved by lateral translation of the grating to obtain the unwrapped phase distribution as the corresponding sinogram of the object slide under inspection. The sinogram allows tomographic reconstruction of slices by standard procedures. Composite interferograms and preliminary reconstructions for some transparent samples are shown.
机译:提出了一种用于相像断层检查的实验装置。该系统基于干涉仪,该干涉仪在输入平面中使用两个窗口,并使用平移光栅作为其瞳孔。在输出中,可以通过相对于光栅周期正确选择窗口之间的间隔来实现与复制窗口相关的场的干扰。将旋转的对象放置在一个窗口中,参考穿过第二个窗口,投影的相位将以合成干涉图样编码在传统正弦图的平面上。这种复合干涉图的相位步进可以通过光栅的横向平移来实现,以获取展开的相位分布,作为被检查物体滑动的相应正弦图。正弦图允许通过标准程序对切片进行断层摄影。显示了一些透明样本的复合干涉图和初步重建。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号