THE FAILURE ANALYSIS OF SPECIFIC SOURCE-TO-DRAINDISLOCATION AND CASE STUDY

摘要

A failure incurred in the front-end is typically arnbottleneck to production due the need for physical failurernanalysis (PFA) . Often the challenge is to perform timelyrnlocalization of the front-end defect, or finding the exactrnphysical defect for process improvement. Many processrnparameters affect the device behaviour and cause thernfront-end defect. Simply, the failures are of two types:rnhigh-resistance and leakage. A leakage mode defect is thernmost difficult to inspect. Although conductive atomic forcernmicroscopy and six probes nano-probing are popular toolsrnfor front-end failure inspection, some specific defects stillrnneed more effort. The electrical phenomenon and analysisrnof a crystalline defect will be demonstrated in this paper.rnThe details will be discussed below.