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DEVELOPMENT OF THE LARGE CURRENT CLUSTER ION BEAM TECHNOLOGY

机译:大电流簇离子束技术的发展

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摘要

In order to get the large current cluster ion beam, the cluster generator and ion extraction were studied. The intensity of neutral beams generated from various shapes of nozzles was measured and the efficient cluster generation was realized. An orifice diameter of skimmer was adjusted to the diameter of beams and the 5 times stronger neutral beam could be generated. The maximum acceleration voltage became 45 kV by improvement of the accelerator and the efficient extraction was realized. As a result, the maximum Ar cluster beam current of 922 μA was achieved.
机译:为了获得大电流簇离子束,研究了簇发生器和离子提取。测量了从各种形状的喷嘴产生的中性束的强度,并实现了有效的簇生成。将撇渣器的孔口直径调整为横梁的直径,可产生5倍的中性横梁。通过加速器的改进,最大加速电压变为45 kV,实现了有效的提取。结果,实现了最大的922簇的Ar簇束电流。

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