DEVELOPMENT OF THE LARGE CURRENT CLUSTER ION BEAM TECHNOLOGY

摘要

In order to get the large current cluster ion beam, the cluster generator and ion extraction were studied. The intensity of neutral beams generated from various shapes of nozzles was measured and the efficient cluster generation was realized. An orifice diameter of skimmer was adjusted to the diameter of beams and the 5 times stronger neutral beam could be generated. The maximum acceleration voltage became 45 kV by improvement of the accelerator and the efficient extraction was realized. As a result, the maximum Ar cluster beam current of 922 μA was achieved.