Polishing Experiment of Micro Rod by Ultrasonic with Abrasive Particles

摘要

Micro rod is the important component of micro machines. Its surface quality directly influences many performances of the micro machines. In order to improve the surface quality of the micro rods, the preliminary experiments of ultrasonic polishing micro rod are carried out by using abrasive particles with the mode of slurry vibrating. The ultrasonic wave excites the slurry to produce acoustic streaming, and causes abrasive particles to scrap the surface of the micro rod and produce grooves. The length of the grooves is about two times of the ultrasonic amplitude. The width and depth of the grooves relate to the abrasive size. The space-between relates to the abrasive size and slurry concentration. After polished,, the surface and grooves become smooth, which is beneficial to the lubrication of the micro rod in the micro hole. The quality of the surface polished as the rod is inserted into the micro hole is higher than the one as the rod isn't inserted into the hole.