Microdynamic Characteristics of Linear Piezomoter with Nanometer Resolution

摘要

The microdynamic characteristics of a linear piezomotor is studied through modeling and experiments. A model is established by simplifying the piezomotor as a general viscously damped six-degree-of-freedom system.in travel direction. The model can be used to obtain six displacement outputs responding to six external force inputs in the travel direction and to study the effects of initial displacements and velocity conditions on the microdynamic characteristics. A laser interferometer is used to test the performance of the piezomotor under both open- and closed-loop controls. The results are helpful in designing and developing new linear piezomotors.