Dispersive White-light Interferometry for 3-D Inspection of Thin-film Layers of Flat Panel Displays

机译：用于平板显示器薄膜层的3-D检查的色散白光干涉仪

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We present a dispersive scheme of white-light interferometry that enables to perform tomographical measurements of thin-film layers without mechanical depth scanning. This scheme is found well suited particularly for high-speed 3-D inspection of micro-engineered thin-film layers patterned on flat panel displays.

机译：我们提出了一种白光干涉测量的色散方案，该方案能够在不进行机械深度扫描的情况下执行薄膜层的层析成像测量。发现该方案特别适合于对在平板显示器上构图的微工程薄膜层进行高速3D检查。

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《International Conference of the European Society for Precision Engineering and Nanotechnology vol.1; 20060528-0601; Vienna(AT)》|2006年|382-385|共4页
会议地点 Vienna(AT)
作者
Young-Sik Ghim; Jungjae Park; Seung-Woo Kim;
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Billionth Uncertainty Precision Engineering Research Group, Korea Advanced Institute of Science and Technology, Science Town, Daejeon, 305-701, South Korea;

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正文语种 eng
中图分类特种结构材料;
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专利

1. Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure [J] . Young-Sik Ghim, Seung-Woo Kim Applied optics . 2009,第4期

机译：光谱解析白光干涉仪，用于薄膜层结构的3D检查
2. Contactless Functionality Inspection of Flat-Panel-Display Pixels and Thin-Film Transistors by Capacitive Coupling [J] . Koerdel M., Alatas F., Schick A., Electron Devices, IEEE Transactions on . 2012,第12期

机译：电容耦合的平板显示器像素和薄膜晶体管的非接触式功能检查
3. Dispersive white-light spectral interferometry including the effect of thin-film for distance measurement [J] . Hlubina P, Ciprian D, Lunacek J Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic . 2007,第7期

机译：色散白光光谱干涉法，包括薄膜对距离测量的影响
4. Dispersive white-light interferometry for 3-D inspection of thin-film layers of flat panel displays [C] . Young-Sik Ghim, Joonho You, Seung-Woo Kim Optical Measurement Systems for Industrial Inspection V pt.1; Proceedings of SPIE-The International Society for Optical Engineering; vol.6616 pt.1 . 2007

机译：色散白光干涉仪，用于3-D检查平板显示器的薄膜层
5. Indium-Gallium-Zinc Oxide Thin-Film Transistors for Active-Matrix Flat-Panel Displays. [D] . Mahmoudabadi, Forough. 2017

机译：用于有源矩阵平板显示器的铟镓锌氧化物薄膜晶体管。
6. Symptomatic accommodative and binocular dysfunctions from the use of flat-panel displays [O] . Esteban Porcar, Juan Carlos Montalt, Álvaro M. Pons, 2018

机译：使用平板显示器的症状性调节性和双眼功能障碍
7. Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry [O] . Young-Sik Ghim, Seung-Woo Kim 2006

机译：薄膜厚度曲线及其分散白光干涉测量的折射率测量

Dispersive White-light Interferometry for 3-D Inspection of Thin-film Layers of Flat Panel Displays

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