300mm Low K Wafer Dicing Saw Study

摘要

With the further shrink of the IC dimension, the low K material has been widely used to replace the traditional SiO2 ILD in order to reduce the interconnect delay. The introduction of low k material into silicon imposed challenges on dicing saw process, ILD & metal layers peeling and its penetration into the sealing ring of the die during dicing saw are the most common defects. In this paper, the low k material structure and its impact on wafer dicing were elaborated. A practical dicing quality inspection matrix was developed to assess the cutting process variation. A 300mm CMOS90nm dual damascene low K wafer was chosen as a test vehicle to develop robust low k dicing saw process. The critical factors (dicing blade, index speed, spindle speed, cut in depth, test pattern in the saw street...) affecting cutting quality were studied and optimized. The selected C90 Dual damascene low k device passed package reliability test with the optimized low K dicing saw recipe & process. The further improvement & solutions in eliminating the low K dicing saw peeling from both wafer fab and packaging assembly were also explored.