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Oxidation Failure Mechanism of Copper Alloy Lead Frame for IC Package

机译:IC封装用铜合金引线框的氧化失效机理

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摘要

The most important factor that causes delamination between copper alloy lead frame and epoxy mold compound is copper oxide. To identify the factors that influence the formation of oxide film on copper substrate, oxidation mechanism of several lead-frame copper alloys was investigated. The oxide film structure of copper alloy was found to be CuO/Cu_2O/Cu by AES analysis. Various copper alloys had great difference in CuO/Cu_2O ratio. Oxidation rate of copper alloy was further studied by measuring the oxide thickness as a function of time at 320℃. The results showed that C5191 and C7025 had lower oxidation rate than EFTEC64T and C194, which promoted the growth of CuO. The calculation from AES depth profile of copper atom confirmed that grain boundary diffusion coefficients of C5191 and C7025 were nearly two magnitudes smaller than those of EFTEC64T and C194. At a low temperature (usually below half of melting point), the growth of oxide film is mainly dominated by the grain boundary diffusion.. It was found by SPM analysis that copper alloys with smaller grain size had more paths for copper atom to diffuse from substrate to the interface of oxide and air, thus leading to higher oxidation rate. The segregation effect of solute elements of copper alloys at the oxide/substrate interface also played an important role in the growth of oxide.
机译:导致铜合金引线框架与环氧模塑化合物分层的最重要因素是氧化铜。为了确定影响铜基板上氧化膜形成的因素,研究了几种引线框架铜合金的氧化机理。通过AES分析发现铜合金的氧化膜结构为CuO / Cu_2O / Cu。各种铜合金的CuO / Cu_2O比值差异很大。通过在320℃下测量氧化物厚度随时间的变化,进一步研究了铜合金的氧化速率。结果表明,C5191和C7025的氧化速率低于EFTEC64T和C194,从而促进了CuO的生长。根据铜原子的AES深度分布进行的计算证实,C5191和C7025的晶界扩散系数比EFTEC64T和C194的晶界扩散系数小近两个数量级。在低温(通常低于熔点的一半)下,氧化膜的生长主要受晶界扩散的控制。通过SPM分析发现,晶粒尺寸较小的铜合金具有更多的铜原子从中扩散的路径。基质与氧化物和空气的界面,从而导致更高的氧化速率。铜合金中的溶质元素在氧化物/基体界面处的偏析作用在氧化物的生长中也起着重要作用。

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