Calibration of a Spherical Nanoindenter by Using the Metrological Scanning Probe Microscope

摘要

Nanoindentation has been shown to be a useful technique for characterizing the mechanical properties of materials and thin films in particular. A spherical indenter has the special feature in this field, but the calibration of spherical indenters is much difficult. This paper describes a calibration methodology by using the metrological Scanning Probe Microscope, including measurement evaluation and comparison.