INVESTIGATION OF THE METROLOGICAL CHARACTERISTICS OF A SCANNING PROBE MEASURING MICROSCOPE USING TGZ TYPE CALIBRATION GRATINGS

K. V. Gogolinskii; K. L. Gubskii; A. P. Kuznetsov; V. N. Reshetov; I.I. Maslenikov; S. S. Golubev; V. G. Lysenko; S. I. Rumyantsev

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INVESTIGATION OF THE METROLOGICAL CHARACTERISTICS OF A SCANNING PROBE MEASURING MICROSCOPE USING TGZ TYPE CALIBRATION GRATINGS

机译：用TGZ型标定光栅研究扫描探针的微观计量学特征。

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The structure and operating principle of the NanoSkan-3Di scanning probe microscope are briefly described. An investigation of the metrological characteristics of this measuring system using linear TGZ-type gratings demonstrated the high level of reproducibility of the measurements and showed that the results agree with the data obtained in a calibration at the PTB (Germany).

机译：简要介绍了NanoSkan-3Di扫描探针显微镜的结构和工作原理。使用线性TGZ型光栅对该测量系统的计量学特性进行的研究表明，测量结果具有很高的可重复性，并表明结果与PTB（德国）在校准中获得的数据相符。

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来源
《Measurement techniques》 |2012年第4期|p.400-405|共6页
作者
K. V. Gogolinskii; K. L. Gubskii; A. P. Kuznetsov; V. N. Reshetov; I.I. Maslenikov; S. S. Golubev; V. G. Lysenko; S. I. Rumyantsev;
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作者单位

Technological Institute of Superhard and New Carbon Materials, Troitsk, Russia;

National Nuclear Research University - Moscow Engineering-Physics Institute (NIYaU MIFI), Moscow, Russia;

National Nuclear Research University - Moscow Engineering-Physics Institute (NIYaU MIFI), Moscow, Russia;

National Nuclear Research University - Moscow Engineering-Physics Institute (NIYaU MIFI), Moscow, Russia;

Moscow Institute of Physics and Technology (MFTT), Dolgoprudnyi, Russia;

All-Russia Research Institute of Metrological Service (VNIIMS), Moscow, Russia;

All-Russia Research Institute of Metrological Service (VNIIMS), Moscow, Russia;

All-Russia Research Institute of Metrological Service (VNIIMS), Moscow, Russia;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类
关键词
scanning probe microscope; three-coordinate heterodyne interferometer; topography; nanometer structures; calibration gratings;

机译：扫描探针显微镜三坐标外差式干涉仪地形;纳米结构;校准光栅;
入库时间 2022-08-17 13:11:11

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1. Investigation into sources of random uncertainties in the NanoScan-3Di metrological scanning probe microscope [J] . Gogolinskii K.V., Gubskii K.L., Kuznetsov A.P., Nanotechnologies in Russia . 2013,第5a6期

机译：NanoScan-3Di计量扫描探针显微镜中随机不确定性来源的调查
2. Fabrication of grating-like polystyrene latex monolayer structure as three-dimensional calibration standards for scanning probe microscope [J] . Zhu Guo-Dong, Zeng Zhi-Gang, Guo Zhang, 中国物理：英文版 . 2009,第003期

机译：制作格子状聚苯乙烯乳胶单层结构作为扫描探针显微镜的三维校准标准
3. AN INVESTIGATION OF METHODS OF MEASURING THE DIAMETER OF THE ELECTRON PROBE OF SCANNING ELECTRON MICROSCOPES USING MODERN NANOMETER BAND STANDARD MEASURES [J] . F. V. Bulygin, V. L. Lyaskovskii Measurement techniques . 2010,第9期

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5. Probing microscopic properties of low-dimensional inorganic materials using scanning probe microscopes. [D] . Liu, Jie. 1996

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6. Measuring diffusion of lipid-like probes in artificial and natural membranes by raster image correlation spectroscopy (RICS): use of a commercial laser-scanning microscope with analog detection [O] . Ellen Gielen, Nick Smisdom, Martin vandeVen, -1

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8. Scanning Probe Lithography. 4. Effect of Scanning Tunneling Microscope TipParameters on Lithographic Patterns in Self-Assembling Monolayers [R] . Schoer, J. K., Crooks, R. M. 1996

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INVESTIGATION OF THE METROLOGICAL CHARACTERISTICS OF A SCANNING PROBE MEASURING MICROSCOPE USING TGZ TYPE CALIBRATION GRATINGS

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