Hydrodynamic Modeling of Nanoparticle Dynamics in Dusty Plasmas

摘要

A 1D hydrodynamic model is developed to simulate the first stages of dust formation in low pressure capacitively coupled radio-frequency silane (SiH_4) discharges. Besides a discussion of possible particle generation routes, the nanoparticle dynamics (transport and growth) are investigated. Particularly the role of the thermophoretic force on the nanoparticle transport will be presented.