Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica-like films on polymeric webs

摘要

Silica-like films were deposited on PEN and PET polymeric foils in atmospheric pressure glowdischarge (APGD) in a roll-to-roll reactor open to ambient air. APGD was ignited in a mixture ofinexpensive carrying gas argon and nitrogen with oxygen and hexamethyldisiloxane (HMDSO)precursor. The uniform diffuse glow in various gas mixtures was sustained by utilizing electronicstabilization network. APGD operation in air for a present setup was demonstrated. Thecontribution of different deposition mechanisms to the resulting silica-like film is discussed. Thedependence of film structure and chemical composition on the conditions during depositionprocess was studied by means of SEM, ATR-FTIR and XPS analysis. The influence of oxidantconcentration on the deposited film properties is analyzed and discussed.