Plasma dynamics in hollow cathode triggered discharge with influence of fast electrons on ionization phenomena and EUV emission

摘要

The 2-D computational code Z* is used to simulate physical phenomena in hollow cathode triggered lowpressurecapillary discharge at different phases of the process: electron beam generation, formation of achannel by ionization wave, and discharge dynamics together with ionization kinetics and plasma emission,particularly in EUV band interesting for applications. Run-away electrons in gas-filled capillary dischargewith hollow cathode play an important role both in ionization wave propagation, and in ionization ofmulticharged ions in discharge plasma. The electron beam prepares a tight ionized channel. The fastelectrons shift the ionization equilibrium in discharge plasma increasing the EUV emission from relativelylow-temperature plasma of argon or xenon. At ionization wave stage, the electron flow is simulated inelectron-hydrodynamic model. At discharge stage, the plasma is described by the radiativemagnetohydrodynamics with ionization kinetics and radiation transfer.