Development of Three-Dimensional Motion Convert Micromachines with Large Deflective Elastic Hinges Based on Bulk and Surface Micromachining Techniques

摘要

In the present paper, a motion convert mechanism of three-dimensional micromachines is proposed by making use of number synthesis of mechanisms. The output point of the proposed mechanism can move in the vertical direction when two linear input points move in the inverse horizontal dirction. And the output point can move in the horizontal direction when two linear input points move in the same horizontal direction. The validity and the characteristics of the proposed mechanism are investigated theoretically and experimentally by using a polyethylene macromodel manufactured by a small modeling injection machine. Finally, an example of a micromechanism manufactured by semiconductor fine-machining technique is shown.