Electrically Controlled Liquid-crystal Microlens Arrays Based on Plane Nonuniform Spiral Microcoils

摘要

In this paper, a new type of electrically controlled liquid-crystal microlens arrays (ECLCMAs) based on plane nonuniform spiral microcoils (PNSMs) is proposed. The microlens array is based on a nematic liquid-crystal material, which presents a special characteristics of optical anisotropy and birefringence, and is fabricated by common ultraviolet lithography and dry ICP etching process to form needed PNSMs pattern. In the ECLCMAs, a glass substrate precoated by a film of indium tin oxide (ITO) on both surfaces of substrate is adopted. The key center electrode for shaping each functioned LC cell is drilled using a laser etching and emery polishing process. Metallic indium particles are selected to connect the upper and lower ITO layers. The design can guarantee the continuity of the upper and lower plates and does not affect the electric and magnetic fields generated by spiral microcoils, which are utilized to drive LC film to present needed functions of further controlling and adjusting incident microbeam distribution, which is preprocessed by main objective lens system. After an AC voltage signal is applied across the microcoil, an effective electromagnetic field can be formed in LC cell so as to drive LC molecules to rotate and thus demonstrates an electrically tuning focus. The simulations show that the design of patterned PNSMs can be effectively used to form a sufficient electric and magnetic fields that are directly used to rotate LC molecules and thus form a gradient refractive index distribution for converging incident microbeams so as to show a higher controlling-light efficiency than that of traditional patterned microelectrodes. The proposed method laid a solid foundation for future smart ECLCMAs.